Prof. Zhicheng Yuan

Tongji University, Shanghai, China.

Email: zhicheng_yuan@tongji.edu.cn

Bio

Dr. Zhicheng YUAN is a distinguished researcher and doctoral supervisor at Tongji University. He received his bachelor's, master's and doctor's degrees from China University of Mining and Technology, Tongji University and Kyoto University successively. In 2021, he was engaged in postdoctoral research at the University of Tokyo, and then engaged in the development of high precision equipment at the 2012 Laboratory of Huawei Technologies Co., Ltd. In 2022, he was selected into Shanghai Leading Talents (Overseas) Project and the "Young Hundred" Program of Tongji University. His research interests are multi-scale dynamic wetting, lab-on-a-chip, CFD for liquid-wall interaction, heat and mass transfer, etc.

Title

Wettability Modification Powered Stabilization of Gas-liquid Interface and Suppression of Two-phase Flow-induced Vibrations

Abstract

Immersion lithography is a key technology for manufacturing advanced integrated circuits (IC). However, serious two-phase fluid-induced vibration (FIV) can be brought about because of the gas-liquid extraction introduced by the dynamic sealing strategy, leading to the deterioration of wafer stage control accuracy and exposure accuracy. Existing research show that the pressure fluctuation in the pipe caused by the instability of the gas-liquid interface is the root cause of the vibration induced by two-phase flow. Since surface tension dominates in the microscale, this work aims to clarify the influence of surface wettability on the interface stability and flow-induced vibrations. Considering the difficulty in measuring the micro-vibration force experimentally, simulations are conducted by using the open-source package OpenFOAM. To track the liquid-air interface, the volume of fluid (VoF) method based interFoam solver is selected, and its shipped dynamic contact angle model is modified to obtain better accuracy when considering the wettability of pipe’s inner-surface. Then, the validated solver is extended to investigate the effect of surface wettability on the interface stability and FIV. The findings will provide effective technical support for suppressing the two-phase vibration by surface modification in immersion lithography.